Model |
DM69 |
DM88 |
DM97-08 |
DM97-15 |
DM241 |
DM277 |
DM468 |
DM820 |
Number of actuators |
69 |
88 |
97 |
97 |
241 |
277 |
468 |
820 |
Pupil diameter |
10.5 mm |
20.0 mm |
7.2 mm |
13.5 mm |
37.5 mm |
24.5 mm |
33.0 mm |
45.0 mm |
Pitch |
1.5 mm |
2.5 mm |
0.8 mm |
1.5 mm |
2.5 mm |
1.5 mm |
Maximum mirror best flat in close loop |
7.0 nm RMS (no print through effects) |
Minimum tip/tilt stroke (PV, wavefront) |
60 μm |
40 μm |
80 μm |
60 μm |
40 μm |
15 μm |
Minimum focus/astig. stroke (PV, wavefront) |
40 μm |
30 μm |
40 μm |
40 μm |
30 μm |
10 μm |
Minimum 3x3 stroke (PV, wavefront) |
> 25 μm |
> 10 μm |
Maximum settling time (at +/-1 0%) |
800 µs |
1.6 ms |
800 µs |
1.6 ms |
500 µs |
Minimum bandwidth* |
> 750 Hz |
> 400 Hz |
> 750 Hz |
> 400 Hz |
> 2 000 Hz |
Minimum frequency at phase lag of 45° |
> 500 Hz |
> 300 Hz |
> 500 Hz |
> 300 Hz |
> 1 500 Hz |
Hysteresis error |
<2% |
Nonlinearity error |
<3% |
Coating* |
银膜R>96.5%@0.5μm~2μm |
Operating temperature |
-10 to 35°C |